నైరూప్య

Design and Simulation of MEMS Comb Vibratory Gyroscope

S.Yuvaraj, V.S.Krushnasamy

MEMS is (Micro Electro Mechanical Systems) refer to device or systemthat’s integrated with electrical and mechanical modules in the scale of microns. It is low power consumption, very small in size, very low price, and high efficiency in nature. In this study a novel comb-drive, variance capacitance detecting gyroscope is actuated to vibrate along X-axis by electrostatic comb driving. If the angular velocity along Y-directions is expert, theCoriolises force actuates the central proof mass along Z-directions. The size of the driving beams and sensing beams are sensibly chosen to reducing the frequency mismatch in two directions, thus increasing the sensitivity of gyroscope. Intellisuite simulation is used to find out the device frequency and displacement. Gyroscope is most commonly used in inertial navigation, automobile, aerospace ship, consumer products, micro satellite, etc